The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 1977
Filed:
Aug. 19, 1975
Horst Kiemle, Neuried, DT;
Siemens Aktiengesellschaft, Berlin & Munich, DT;
Abstract
A device for testing masks, such as used in producing semiconductor components characterized by a source projecting a beam of coherent light at the mask, a multiple optic means which is either a lens raster or an objective lens arranged with a multiple hologram disposed in the path of the beam of light for converting the beam into a plurality of individual beams and focusing each of the individual beams on discrete points on the mask and a detector for detecting any light passed by the mask. Preferably, the device includes means for pivoting the beam from the source about one or two axes lying in a plane of the multiple optic means so that all of the individual beams are moved to scan in at least one direction.