The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 1977
Filed:
Jun. 20, 1975
Applicant:
Inventors:
Assignee:
Agence Nationale de Valorisation de la Recherche (ANVAR), Neuilly-sur-Seine, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250288 ; 250309 ; 2504 / ; 2504 / ;
Abstract
In an apparatus for local surface analysis of a target sample in which an ion probe is directed to the target for sputtering particles. A chamber having walls heated to a high temperature (above 2200.degree. K as a rule) collects sputtered particles. The particles entering the chamber are subjected to successive adsorptions and desorptions before they leave the chamber for entry into a mass spectrometer. Scanning may be provided as in conventional SIMS systems.