The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 1976
Filed:
Dec. 15, 1972
Applicant:
Inventor:
Henry Yasuo Kumagai, Lower Macungie Township, Lehigh County, PA (US);
Assignee:
Western Electric Company, Inc., New York, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C01C / ;
U.S. Cl.
CPC ...
204192 ;
Abstract
A method for forming a nitrogen doped-beta tantalum thin film which comprises sputtering tantalum in a nitrogen atmosphere such that the ratio of tantalum atoms to nitrogen atoms in the deposited film ranges from about 9/1 to about 999/1. Such films are useful in the fabrication of thin-film capacitors.
Quick Actions:
Kumagai, Henry. (1976). Method of depositing nitrogen-doped beta tantalum (U.S. Patent No. 4000055). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4000055
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile