The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 1976
Filed:
Jun. 27, 1975
Einar Skau Mathisen, Poughkeepsie, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A thin flat circular silicon wafer is mounted or supported by a wafer holder mounted on an X-Y table. Motive means drives the table in two different linear directions so as to selectively position different areas of the wafer beneath a test probe. A plurality of wafer chips are also mounted on the table at different positions locatable beneath the test probe. Each of the wafer chips has different characteristics suitable for use in calibrating the test system. The wafer chips are located at predetermined positions relative to a reference position so that the table can be automatically moved during calibration to present the wafer chips to the test probe.