The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 1976
Filed:
Mar. 24, 1971
Applicant:
Inventors:
Alfred J Thelen, Santa Rosa, CA (US);
John A Aguilera, Santa Rosa, CA (US);
James N Grant, Healdsburg, CA (US);
George Eugene Michel, Santa Rosa, CA (US);
Assignee:
Optical Coating Laboratory, Inc., Santa Rosa, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118-9 ; 118 49 ;
Abstract
In vapor deposition apparatus, a plurality of spaced substrates on a rotatable horizontally disposed support, a vapor source disposed below said support and offset with respect to the axis of rotation of the support, and a mask extending approximately 180.degree. which is uniformly disposed and diametrically opposed with respect to said source whereby the effective vapor stream is generally normal to exposed substrates. A continuously exposed monitor chip is provided.