The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 1976
Filed:
Feb. 01, 1974
Robert Bosch G.m.b.H., Stuttgart, DT;
Abstract
Separator shields are provided between the substrates subject to sputtering and the boundaries between cathodes or between portions of the cathodes exposing different materials to be sputtered by a glow discharge. The shields extend to a few millimeters' spacing from the cathode and are at a potential at or near ground potential within .+-. 50 volts of the potential of the substrates. A common rear and side shield and a common electrical feed-through connection is provided for the cathode structure or cathodes. The substrates may be passed repeatedly through the sputtering zone or, in a circular configuration, can be moved in a circular path, so as to facilitate alloy-type coatings by producing very thin layers in alternation. The shielding reduces masking of one material by another on the cathode by cross-sputtering, thereby maintaining close to constancy the sputtering rates of the different materials for up to several hundred hours of operation. The cathode base plate of a composite cathode can be repeatedly used in successive operations with new material to be sputtered.