The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 21, 1976

Filed:

Mar. 10, 1975
Applicant:
Inventor:

Warren C Rosvold, Sunnyvale, CA (US);

Assignee:

Signetics Corporation, Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ;
U.S. Cl.
CPC ...
204298 ; 118 49 ; 118 491 ; 118 495 ; 118 50 ; 118 501 ;
Abstract

Vacuum sputtering apparatus for treating articles having a housing forming a main vacuum chamber with a plurality of work stations therein. A lock chamber is provided in the main vacuum chamber through which articles can be inserted and removed. Means is provided in the main vacuum chamber for advancing the articles sequentially through the work stations in the main chamber so that as articles are being removed from the lock chambers, articles which have passed through the work stations can be removed from the main vacuum chamber through the lock chamber. In the method articles are introduced into the main vacuum chamber through a lock chamber, and they are intermittently progressively advanced through a plurality of work stations in the main vacuum chamber and then are removed through the lock chamber.


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