The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 1976
Filed:
Mar. 24, 1975
Applicant:
Inventors:
Klaus Zeuch, Eckental, DT;
Josef Stadter, Erlangen, DT;
Assignee:
Siemens Aktiengesellschaft, Munich, DT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F27D / ; G01K / ;
U.S. Cl.
CPC ...
7334 / ; 2327 / ; 73354 ; 156601 ; 236 / ;
Abstract
Apparatus for measuring the temperature of a granular semiconductor material of the type which is evaporated when manufacturing a semiconductor such as gallium phosphide within an ampoule or reaction tube, in which a temperature sensor is installed in a measuring tube having a closed end extending into the ampoule and the semiconductor material therein and an opened end which is sealed into a suitable opening in the end of the ampoule with the electrical leads for the temperature sensor being brought out from the measuring tube through the opening in the ampoule.