The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 1976
Filed:
Jun. 07, 1973
Applicant:
Inventor:
Hans Stut, Groebenzell, DT;
Assignee:
Siemens Aktiengesellschaft, Berlin & Munich, DT;
Primary Examiner:
Int. Cl.
CPC ...
C23c / ;
U.S. Cl.
CPC ...
118-5 ; 118-8 ; 118 491 ;
Abstract
An electric precipitation device and a method of producing highly pure semiconductor rods, in particular semiconductor rods consisting of silicon, by means of thermal decomposition and precipitation on corresponding carrier members in which a heating current which traverses the thickening carrier member is utilized for controlling at least one additional parameter which influences the precipitation of the semiconductor material. A process computer is preferably utilized for effecting control.