The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 1976
Filed:
Sep. 22, 1975
Applicant:
Inventors:
Vittorio De Nora, Nassau, BA;
Bohumil Polata, Los Altos, CA (US);
Assignee:
Signetics Corporation, Sunnyvale, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
148-15 ; 29578 ; 29580 ; 148175 ; 148187 ; 357 20 ; 357 34 ; 357 48 ; 357 88 ; 357 89 ; 357 91 ;
Abstract
The buried layer of an integrated circuit is produced by use of a grated mask. The growth of silicon dioxide in the exposed areas of the grate forms a stepped surface. Thereafter ion implantation in these areas and then merging the implanted regions forms a single buried region having a corrugated surface on which an epitaxial layer is grown. Such corrugated surface reduces the defect regions in the epitaxial layer.