The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 1976
Filed:
Jan. 02, 1975
Donald Ralph Thomas, Westford, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Method and apparatus for measuring or determining characteristics, such as width and resistivity of a given conductive line, particularly a conductive line produced by integrated circuit technology. The conductive line, having a first width which is formed on an insulating medium is disposed in the vicinity of or adjacent to a second line having a second width different from the first width, which is also conductive and which is made by the same process by which the given conductive line was made. A common constant current is passed through the given conductive line and through the second line. A first voltage is measured between two points spaced apart by a given distance along the given conductive line and a second voltage is measured between two points spaced apart by the given distance along the second line. Characteristics, such as width and resistivity, of the given conductive line, as well as those of the second line, are then determined by utilizing relationships between the measured voltages and known line constants.