The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 1976
Filed:
Aug. 25, 1975
Applicant:
Inventors:
Stanley Zirinsky, Dobbs Ferry, NY (US);
Eugene A Irene, Wappingers Falls, NY (US);
Victor J Silvestri, Mount Kisco, NY (US);
Assignee:
IBM, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
148187 ; 148-15 ; 357 23 ; 357 41 ; 357 54 ; 423324 ; 423351 ; 427 82 ; 427 93 ; 427 94 ; 427 95 ; 427126 ; 427248 ;
Abstract
Method for depositing a layer containing Al; N, and Si on a substrate which comprises providing a substrate to be coated, a carrier gas, and a gaseous mixture of nitrogen source compounds, aluminum source compounds and silicon source material and heating the substrate to a temperature in the range of about 500.degree. to about 1,300.degree. C to thereby cause formation on the substrate of a layer containing Al, N, and Si; and products obtained by the method.