The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 1976
Filed:
Feb. 08, 1974
Neal Jay Tolar, Plano, TX (US);
Robert Curlee Hooper, Plano, TX (US);
Prabhakar Bhimrao Ghate, Dallas, TX (US);
Clyde Rhea Fuller, Plano, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A process has been developed for fabricating a nonpolar low loss thin film capacitor utilizing tantalum oxide for high capacitance per unit area as a dielectric which is deposited in film form relative to a suitable substrate. A counter electrode is deposited on a substrate. A film of metal having a high recrystallization temperature is deposited on the counter electrode. This deposition forms the bottom electrode of the capacitor structure. The metal film has a quality thermal expansion resistance and a high reliability in thermal environments.