The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 1976
Filed:
Aug. 21, 1973
Applicant:
Inventors:
Michel Croset, Paris, FR;
Noel Nouailles, Paris, FR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
29625 ; 29590 ; 174 685 ; 3171 / ;
Abstract
A method of manufacturing multilayer interconnections for interconnecting veral mutually insulated groups of contact zones formed on an integrated circuit semiconductor chip is provided. The adjacent superimposed interconnection films are separated by an insulating film of a metal oxide produced by the total oxidation of a metal film deposited on the chip prior to the formation of the top layer of interconnections. The metal deposited at the locations of the contact zones is protected against oxidation so that the contact zones are all times accessible at the surface.