The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 15, 1976

Filed:

Jun. 09, 1975
Applicant:
Inventors:

Hans R Zulliger, Portola Valley, CA (US);

Lee M Middleman, Portola Valley, CA (US);

Assignee:

Nuclear Semiconductor, Menlo Park, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K / ; G21K / ; G01N / ; G01N / ;
U.S. Cl.
CPC ...
250272 ; 250273 ; 250310 ; 250311 ;
Abstract

An electron beam from an electron column instrument impinges on a target foil to produce a primary X-ray beam which, in turn, passes through a collimator to impinge on a specimen. The X-rays fluoresced from the specimen by the primary X-ray beam are detected by a solid state radiation detection device.


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