The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 1976
Filed:
Aug. 29, 1974
Applicant:
Inventor:
Helmut Freller, Nurnberg, DT;
Assignee:
Siemens Aktiengesellschaft, Munich, DT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
427251 ; 427255 ; 427252 ; 427294 ; 427314 ; 427347 ;
Abstract
Preparation of thin layers of tungsten or molybdenum on a highly temperature-resistant layer substrate by thermal evaporation in a high vacuum, where WO.sub.3 or MoO.sub.3, respectively, is evaporated and the layer substrate is heated so that the oxides are decomposed and a pure tungsten or molybdenum layer is deposited on the layer substrate.