The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 1976
Filed:
Sep. 16, 1974
Applicant:
Inventors:
David Isaac Harris, Kendall Park, NJ (US);
Loren Bainum Johnston, Princeton, NJ (US);
Assignee:
RCA Corporation, New York, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05D / ; G03F / ;
U.S. Cl.
CPC ...
427 43 ; 96 35 ; 96 36 ; 96 49 ; 96 9 / ; 427335 ; 156 13 ; 156 17 ;
Abstract
The effective sensitivity of a photo- or electron beam resist is improved by contacting the resist film with developer solution and water prior to exposure.