The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 1976
Filed:
Oct. 16, 1973
Applicant:
Inventors:
Gyoji Suzuki, Asaka, JA;
Masayoshi Nagata, Asaka, JA;
Takeshi Tomotsu, Asaka, JA;
Hisatake Ono, Asaka, JA;
Assignee:
Fuji Photo Film Co., Ltd., Minami-ashigara, JA;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09K / ;
U.S. Cl.
CPC ...
96 36 ; 156-4 ; 156 13 ; 156 17 ; 252 793 ;
Abstract
A light-sensitive etching agent comprising (a) a photodecomposable compound forming upon decomposition a material capable of etching a silicon compound containing film or capable of etching the film after reaction with another material, (b) a material capable of forming water upon exposure to light, (c) a binder and (d) a solvent, and a method of making a semiconductor device utilizing the light-sensitive etching agent.
Published as: