Particulate and aerosol detector

Abstract

The invention is a device for counting aerosols and sorting them according to either size, mass or energy. The component parts of the invention are an accelerator, a capacitor sensor and a readout. The accelerator is a means for accelerating the aerosols toward the face of the capacitor sensor with such force that they partially penetrate the capacitor sensor, momentarily discharging it. The readout device is a means for counting the number of discharges of the capacitor sensor and measuring the amplitudes of these different discharges. The capacitor employed is a metal-oxide-silicon capacitor in which the metal and oxide layers are very thin. The aerosols are accelerated by the accelerator in the direction of the metal layer with such force that they penetrate the metal and damage the oxide layers, thereby allowing the electrical charge on the capacitor to discharge through the damaged region. The impacting aerosols create a discharge path which is self-healing; that is, each incident aerosol initiates a discharge path through the capacitor in such a fashion as to vaporize or blow out the conducting path in the process. Once the discharge action is complete, the low resistance path no longer exists between the two capacitor plates and the capacitor is again able to accept a charge. The active area of the capacitor is reduced in size by the damaged area each time a discharge occurs.