The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 1976
Filed:
Sep. 09, 1974
Philip M Ryan, Hopewell Junction, NY (US);
IBM Corporation, Armonk, NY (US);
Abstract
A square-shaped electron beam is stepped from one predetermined position to another in a line-by-line scan to form a desired pattern on each chip of a semiconductor wafer to which the beam is applied. At each of the predetermined positions, the beam is on, off, or on for a portion of the time period at which the beam is disposed at the predetermined position. The beam also can be offset both along its direction of movement and perpendicular thereto at each of the predetermined positions. Control of this movement of the beam is obtained through utilizing a memory with no change being made in the memory if the predetermined position at the next line does not have any change from the predetermined position at the line along which the beam is moving.