The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 1976
Filed:
May. 17, 1974
Applicant:
Inventor:
Gunther Wulff, Trubbach, CH;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
2191 / ; 118 491 ; 324 33 ;
Abstract
An apparatus for electron-beam evaporation comprises a holding structure or support for the substance to be evaporated arranged alongside a hot cathode. A focusing and accelerating electrode is located adjacent the hot cathode and acts on the electrons emitted thereby. Means are provided for generating a magnetic field in the electron flow path in order to deviate the electrons to the substance. An ion-collecting electrode is located adjacent the hot cathode for collecting the ions formed in the vapor beam during the evaporation. The substance to be evaporated, the means for producing the electron beam and the ion-collecting electrode are all arranged in order one after the other in the magnetic field.