The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 02, 1976

Filed:

Oct. 11, 1973
Applicant:
Inventors:

Keiichi Okamoto, Yokohama, JA;

Yoshio Matsumoto, Yokohama, JA;

Yasujiro Oshima, Tokyo, JA;

Assignees:

Hitachi, Ltd., BOTH OF, JA;

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
235 / ; 235 / ; 235 / ; 235 / ; 250557 ; 356172 ;
Abstract

The present invention discloses a scanning photoelectric microscope in which a first reference object to be measured which is mounted on a stationary support is disposed relative to a second object to be measured which is disposed on a slidable table so as to form on both sides of the first object to be measured two indication intervals, which are caused to coincide with each other for alignment. The scanning photoelectric microscope according to the present invention comprises a scanning device for scanning an image reflected from the two indication intervals formed by the first and second objects to be measured at a constant speed to effect parallel displacement, a marker device for detecting positions of a scanned image corresponding to those of motion of the scanning device, and a circuit for detecting the two indication intervals detected by the scanning device in terms of time in response to a signal from the marker device, the second object to be measured being shifted until the two indication intervals coincide with each other.


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