The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 1976
Filed:
Aug. 26, 1974
Mitsuyoshi Nagashima, Sayama, JA;
Citizen Watch Co., Ltd., Tokyo, JA;
Abstract
A finely adjustable table assembly is particularly useful, for example, as a light-exposing device for printing IC (integrated-circuits) patterns and comprises a base plate, a movable table, a plurality of curved plate springs for connecting the movable plate to the base plate, and a non-contact means for driving the movable table. The curved plate springs are arranged perpendicularly to their widths between the movable table and the base plate and, as a sesult, the mass of the movable table is supported by the curved plate springs. As the table driving means, use is made of a non-contact type drive such as an electromagnetic device. The table is capable of being displaced in any direction in a horizontal plane. This displacement can be effected in a highly precise manner because of the absence of mechanical sliding members.