The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 1976
Filed:
May. 22, 1974
George W McDonough, Cupertino, CA (US);
Douglas S Schatz, Santa Clara, CA (US);
Emmett R Anderson, Los Gatos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Induction heated vapor source particularly suitable for vacuum deposition of thin films utililzing a flat wound work coil fabricated of a solid conductor enclosed in a hermetically sealed chamber. A cooling medium is circulated through the chamber about the coil, and the coolant is passed to and from the chamber through fittings which also serve to carry electric power to the coil. A crucible for holding the material to be vaporized is mounted on an adjustable pedestal outside the sealed chamber in the field produced by the coil.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile