The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 1976
Filed:
Jan. 09, 1975
Applicant:
Inventors:
Eugene Samuel Poliniak, Willingboro, NJ (US);
Howard George Scheible, Livingston, NJ (US);
Richard Joseph Himics, Skillman, NJ (US);
Assignee:
RCA Corporation, New York, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05D / ; G11B / ;
U.S. Cl.
CPC ...
427 43 ; 96 351 ; 96 362 ; 96 4 / ; 9611 / ; 20415914 ; 260 / ; 346 / ; 346135 ; 427 44 ; 427273 ; 427350 ;
Abstract
In preparing an electron beam resist film of a copolymer of an olefin and SO.sub.2, the steps of removing insoluble particles, drying the films under high vacuum and storing them in a moisture-free atmosphere are required to prevent cracking of the films during development.