The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 1976
Filed:
Oct. 09, 1973
Cecil A Lasch, Jr, Cupertino, CA (US);
Laszlo Sipos, Saratoga, CA (US);
Karl Ursprung, Santa Clara, CA (US);
Other;
Abstract
Improved apparatus and method for automatically withdrawing silicon wafers or like articles from a supply magazine, transporting the same on a fluid bearing to a station where such articles are pre-aligned in sequence prior to treatment thereof at an adjacent mask aligner or like mechanism, and automatically discharging the articles following such treatment thereof onto another fluid bearing for transportation thereof into a discharge magazine. Improved sensor means is provided in conjunction with the supply magazine and discharge magazine for automatically indexing such magazines to feed and receive wafers in sequence moving relative thereto. During pre-alignment operation, each wafer is automatically rotated on an air bearing until it is oriented with a flat edge surface thereof in a predetermined position, which position is maintained as the wafer is transferred into the mask aligner where fine orientation thereof is completed, either manually or automatically, in accordance with the type of mask aligner apparatus with which the pre-alignment apparatus of this invention is combined.