The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2026
Filed:
Dec. 28, 2021
Ipg Photonics Corporation, Marlborough, MA (US);
Pancho Tzankov, Cupertino, CA (US);
Alex Yusim, Boston, MA (US);
IPG PHOTONICS CORPORATION, Marlborough, MA (US);
Abstract
A method and system for generating deep ultraviolet (DUV) laser light is disclosed, in one embodiment the DUV laser system includes a fiber laser source configured to emit a poised fundamental laser beam in the near-infrared with a pulse duration of less than 400 femtoseconds (fs), a nonlinear crystal assembly comprising first, second, and third nonlinear crystals that is configured to convert the fundamental laser beam to produce a fifth harmonic laser beam having a wavelength in a range from 200 nanometers (nm) to 230 nm, and at least one compensation plate disposed in at least one position preceding at least one of the first, second, and third nonlinear crystals and configured such that a pair of pulsed laser beams transmitted through the at least one compensation plate are spatially and temporally overlapped within the at least one of the first, second, and third nonlinear crystals.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile