Apparatus for analyzing image and operation method thereof

Abstract

Apparatus for analyzing images includes a memory and a processor, and the processor is configured to, by executing the at least one instruction stored in the memory, detect an image coordinate of a defect position in a defect reaction image acquired by imaging a semiconductor device, generate a golden image of the semiconductor device based on a plurality of pattern images acquired by imaging a plurality of semiconductor devices, generate a design layout image corresponding to the pattern image based on a design layout of the plurality of semiconductor devices, generate relationship information between a pattern image and the design layout image based on the pattern image, the golden image, and the design layout image, and extract a design layout image coordinate corresponding to the defect position from the design layout image using the image coordinate of the defect position in the defect reaction image and the generated relationship information.