The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2026
Filed:
Jun. 25, 2024
Ichor Systems, Inc., Fremont, CA (US);
Randolph Treur, San Luis Obispo, CA (US);
Philip Ryan Barros, Pleasanton, CA (US);
Stephen Carson, Woodstock, NY (US);
Michael Vogtmann, Templeton, CA (US);
Haruyuki Kubota, San Francisco, CA (US);
Abstract
Fluid delivery systems are important component assemblies used for semiconductor fabrication. These fluid delivery systems rely on assemblies of components, requiring seals which must be installed and replaced during assembly and maintenance of the fluid delivery systems. Seals may be arranged as seal rings which engage substrate blocks and active components. The seal rings may incorporate an interior sleeve and an outer ring, the interior sleeve having a sleeve fluid passageway. In some implementations, the sleeve fluid passageway may have a constant or varying diameter and the outer ring may incorporate features to improve seal retention within seal cavities in the substrate blocks and active components.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile