Front-end module with vertically stacked die and circulator

Abstract

The present disclosure describes a front-end module (FEM) and a process for making the same. In the disclosed FEM, a thinned flip-chip die, which includes a device region with a metal layer, resides over a module carrier. A mold compound resides over the module carrier, surrounds the thinned flip-chip die, and extends beyond a top surface of the thinned flip-chip die to define an opening over the top surface of the thinned flip-chip die and within the mold compound. A ferrimagnetic portion resides over the top surface of the thinned flip-chip die and within the opening, and a permanent magnetic portion resides over the ferrimagnetic portion and within the opening. Herein, the permanent magnetic portion, the ferrimagnetic portion, and the metal layer of the device region are vertically aligned, and form a circulator vertically stacked with the thinned flip-chip die.