The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2026

Filed:

Nov. 20, 2023
Applicant:

Imec Vzw, Leuven, BE;

Inventors:

Anshul Gupta, Leuven, BE;

Zsolt Tokei, Leuven, BE;

Stefan Decoster, Bertem, BE;

Assignee:

Imec vzw, Leuven, BE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10W 20/00 (2026.01);
U.S. Cl.
CPC ...
H10W 20/081 (2026.01); H10W 20/038 (2026.01); H10W 20/056 (2026.01); H10W 20/062 (2026.01);
Abstract

A method includes forming and patterning a first dielectric over a substrate; covering the first dielectric with metal and planarizing the metal exposing a surface of the first dielectric and forming a first metal; forming a second dielectric over the first dielectric and the first metal; covering the second dielectric with metal and planarizing the metal exposing a surface of the second dielectric and forming a second metal; forming a mask over the second dielectric and the second metal; and transferring: a first sub-pattern of the mask into a first portion of the first metal to form a lower metal, a second sub-pattern of the mask into a first portion of the second metal and a second portion of the first metal to form a stacked metal, and a third sub-pattern of the mask into a second portion of the second metal to form an upper metal.


Find Patent Forward Citations

Quick Actions:

Gupta, Anshul. (2026). Method for forming an interconnection structure (U.S. Patent No. 12787733). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12787733

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