The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2026

Filed:

Mar. 13, 2025
Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventors:

Herbert Terhorst, Amersfoort, NL;

Anne Geertruid Maria Spruit, Utrecht, NL;

Davide Proserpio, Zeist, NL;

Theodorus G.M. Oosterlaken, Oudewater, NL;

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 72/00 (2026.01); C23C 16/448 (2006.01);
U.S. Cl.
CPC ...
H10P 72/0468 (2026.01); C23C 16/448 (2013.01);
Abstract

A vessel for containing a precursor in liquid or solid form is disclosed. The vessel comprises an inlet port for supplying a gas to the interior of the vessel and an outlet port for removing a gas from the interior of the vessel, the inlet port and the outlet port being spaced apart in a first direction, the vessel comprising an upper interior surface and a bottom, opposite interior surface, the upper surface being arranged to face the precursor contained in the vessel in use. The vessel is shaped such that a vertical distance between a top surface of the precursor and the upper interior surface of the vessel varies between the inlet and the outlet, having a minimum value at a point located between the inlet and the outlet in the first direction.


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Terhorst, Herbert. (2026). Vessel for containing precursor (U.S. Patent No. 12787687). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12787687

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