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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12787647 B1

PDFFull Text
Date of Patent:
Nov. 03, 2026

Filed:

Oct. 18, 2021

Piezoelectric element and method for manufacturing piezoelectric element

Applicant:

Stanley Electric Co., Ltd., Tokyo, JP;

Inventor:

Haruki Tanaka, Tokyo, JP;

Assignee:

STANLEY ELECTRIC CO., LTD., Tokyo, JP;

Attorney:

Holtz, Holtz & Volek PC

Primary Examiner:

Derek J Rosenau

Int. Cl.
CPC ...
H01L 41/04 (2006.01); H10N 30/079 (2023.01); H10N 30/20 (2023.01); H10N 30/853 (2023.01); G02B 26/08 (2006.01); G02B 26/10 (2006.01);
U.S. Cl.
CPC ...
H10N 30/2044 (2023.02); H10N 30/079 (2023.02); H10N 30/8554 (2023.02); G02B 26/0858 (2013.01); G02B 26/101 (2013.01);
Abstract

A piezoelectric element includes: a Pt film for a lower electrode provided on a plane of a Si substrate; a PZT film provided on the Pt film; and a Pt film for an upper electrode provided on the PZT film. The PZT film includes a perpendicularly oriented part having a c-axis in a direction perpendicular to the Pt film, and an obliquely oriented part having a c-axis inclined with respect to the c-axis of the perpendicularly oriented part. The c-axis distribution of the obliquely oriented part is discrete with respect to the c-axis distribution of the perpendicularly oriented part.

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Tanaka, Haruki. (2026). Piezoelectric element and method for manufacturing piezoelectric element (U.S. Patent No. 12787647). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12787647

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