The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2026

Filed:

Jun. 06, 2023
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Kenji Yoshida, Tochigi, JP;

Hiroyuki Koide, Tochigi, JP;

Yuma Onizawa, Tochigi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01);
Abstract

A film forming method includes discretely arranging, on a substrate, a plurality of droplets of a curable composition containing a polymerizable compound that is a nonvolatile component, and a solvent that is a volatile component, analyzing an image obtained by capturing a process in which each of the plurality of droplets is connected to an adjacent droplet on the substrate, thereby forming a continuous liquid film on the substrate, volatilizing the solvent contained in the liquid film by enhancing a solvent volatilization effect as compared to the process of forming the liquid film, and forming a cured film by curing the liquid film, wherein if an analysis result obtained in the analyzing satisfies a predetermined condition representing that a forming state of the liquid film is sufficient, a process advances to the volatilizing and then advances to the forming.


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Yoshida, Kenji. (2026). Film forming method, film forming apparatus, and article manufacturing method (U.S. Patent No. 12782806). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12782806

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