The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2026
Filed:
May. 10, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Bernhard G. Mueller, Finsing, DE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method of testing a substrate, particularly a packaging substrate, with at least one electron beam column is described. The packaging substrate can be a panel level packaging substrate or an advanced packaging substrate. The method includes: placing the substrate on a stage in a vacuum chamber; directing the electron beam of the at least one electron beam column with a landing energy U, a first beam diameter BDand a first impact angle θon one or more first surface contact points on the substrate; directing the electron beam with at least one of a second beam diameter BDand a second impact angle θon one or more second surface contact points different from the one or more first surface contact points, wherein at least one of the following applies: i) the first impact angle θis different from the second impact angle θ, and ii) the second beam diameter BDis different from the first beam diameter BD; and detecting signal electrons emitted upon impingement of the electron beam for testing at least a first device-to-device electrical interconnect path of the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile