Acceleration sensor

Abstract

An acceleration sensor, including a first acceleration detection unit configured to detect acceleration in an out-of-plane Z-axis direction, a second acceleration detection unit configured to detect acceleration in an in-plane X-axis direction and/or an in-plane Y-axis direction, a base, a connecting arm, a first anchor point, a first elastic member and a second elastic member. The first acceleration detection unit includes a first seesaw unit and a second seesaw unit arranged opposite to each other to define an annular structure. The annular structure surrounds an outer side of the second acceleration detection unit. The first anchor point is located at a middle part of the substrate, and the connection arm is fixed to the substrate through the first anchor point. The connection arm is located between the first acceleration detection unit and the second acceleration detection unit. A structure design thereof is reasonable and the anti-interference capability is great.