Leakage detection apparatus, substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

Abstract

There is provided a technique that includes: two O-rings arranged between flanges facing each other, wherein the flanges connects pipes and the two O-rings seals an inside of each of the pipes from outside in a double seal manner; a communication hole provided at one of the flanges and communicating with a space surrounded by the two O-rings; a monitor pipe capable of communicating with the communication hole; a pressure gauge connected to the monitor pipe and capable of measuring an inner pressure of the monitor pipe; a valve configured to be capable of being opened and closed to fluidly connect the monitor pipe to an exhaust apparatus; and a controller configured to be capable of controlling an opening and closing operation of the valve so as to maintain a pressure measured by the pressure gauge within a predetermined pressure range lower than inner pressures of the pipes.