The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2026
Filed:
Nov. 14, 2023
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Theodorus G.M. Oosterlaken, Oudewater, NL;
Bert Jongbloed, Oud-Heverlee, BE;
Radko Bankras, Almere, NL;
Bart Lindeboom, Blaricum, NL;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
C23C 16/45572 (2013.01); H10P 72/0402 (2026.01);
Abstract
A gas injector and a semiconductor processing apparatus comprising the gas injector are disclosed. Embodiments of the presently described gas injector comprise an injector tube to inject a process gas to a process chamber of the semiconductor processing apparatus. The gas injector further comprises a cooling fluid conduit constructed and arranged to cool the injector tube.
Quick Actions:
Oosterlaken, Theodorus G.M.. (2026). Gas injector (U.S. Patent No. 12781347). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12781347
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile