The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2026
Filed:
Sep. 09, 2021
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Lipyeow Yap, San Jose, CA (US);
Panya Wongsenakhum, Fremont, CA (US);
Nivin Vikraman, Bangalore, IN;
Gary B. Lind, Penn Valley, CA (US);
Assignee:
LAM RESEARCH CORPORATION, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45565 (2013.01); C23C 16/4404 (2013.01); C23C 16/4412 (2013.01); C23C 16/45561 (2013.01); C23C 16/4557 (2013.01); C23C 16/45572 (2013.01); C23C 16/45574 (2013.01);
Abstract
A showerhead for a processing chamber comprises a metal plate attached to the processing chamber, a ceramic faceplate attached to the metal plate and including a plurality of gas outlets on a substrate-facing surface, and a metal ring surrounding the ceramic faceplate and attached to the processing chamber.
Quick Actions:
Yap, Lipyeow. (2026). Hybrid showerhead with separate faceplate for high temperature process (U.S. Patent No. 12781346). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12781346
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile