The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2026
Filed:
Dec. 15, 2022
Samsung Electronics Co., Ltd., Suwon-si, KR;
Changjun Park, Hwaseong-si, KR;
Jaesung Lee, Seongnam-si, KR;
Junghun Lim, Seongnam-si, KR;
Mihyun Park, Seoul, KR;
Sangwon Bae, Suwon-si, KR;
Jungmin Oh, Incheon, KR;
Hyosan Lee, Seongnam-si, KR;
Abstract
An etching composition for etching a molybdenum film, the etching composition includes about 0.1 wt % to about 5 wt % of an oxidant; about 10 wt % to about 40 wt % of a chelating agent, the chelating agent including a mineral acid; about 0.01 wt % to about 3 wt % of a corrosion inhibitor, the corrosion inhibitor including an ammonium salt, an amine compound, or a combination thereof; and an organic solvent, all wt % being based on a total weight of the etching composition.
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