The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2026
Filed:
May. 20, 2024
Aac Microtech (Changzhou) Co., Ltd., Changzhou, CN;
AAC Microtech (Changzhou) Co., Ltd., Changzhou, CN;
Abstract
Provided is a manufacturing method for a micro-electro-mechanical microphone, including: providing a substrate, and forming a first baffle on the substrate; forming a diaphragm at a side of the first baffle, an orthographic projection of a periphery of the diaphragm towards the first baffle falling onto the first baffle; forming a second baffle at a side of the diagram at an interval, the second baffle being connected to the first baffle, and an orthographic projection of the second baffle towards the diaphragm at least partially falling onto a periphery of the diaphragm; forming a back-plate at a side of the second baffle at an interval, the back-plate including acoustic through-holes; and etching the substrate to form a back-cavity. The manufacturing method aims to improve a degree of freedom of the diaphragm to improve sensitivity of the micro-electro-mechanical microphone while improving the structural strength of the diaphragm.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile