The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2026
Filed:
Dec. 06, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Geethanzali Kamalanathan, Milpitas, CA (US);
Sidharth Bhatia, Santa Cruz, CA (US);
Murali Sridhar, Chennai, IN;
Vijay Anand, Bangalore, IN;
Bala Shyamala Balaji, Bengaluru, IN;
Ananthan Raghunathan, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments described herein relate to a method that includes generating weighted causal graph for a tool through with an informational theory probabilistic approach and/or a statistical approach. In an embodiment, the method further includes generating a criticality score for each of a plurality of nodes within the weighted causal graph, and generating a weighted anomaly score for each of the plurality of nodes. In an embodiment, the weighted anomaly score is calculated based on the criticality score of one or more nodes within a causal group for a given node and a fault metric of the given node. In an embodiment, the method further includes ranking the plurality of nodes based on the weighted anomaly score of each of the plurality of nodes.
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