Mechanical property measuring apparatus, mechanical property measuring method, substance manufacturing equipment, substance management method, and substance manufacturing method

Abstract

Provided are: a mechanical property measuring apparatus and method that can accurately measure a mechanical property through physical quantities; a substance manufacturing equipment and method that can improve the production yield rate. A mechanical property measuring apparatus () comprises: a physical quantity measuring unit () configured to measure a plurality of physical quantities of a measured object that includes a substance and a film on a surface of the substance; a classification processing unit () configured to select one of a plurality of calculation models (M, M, . . . , M) for calculating a mechanical property of the substance, based on at least two of the plurality of physical quantities measured; and a mechanical property calculating unit () configured to calculate the mechanical property of the substance using the calculation model selected by the classification processing unit () and the at least two of the plurality of physical quantities.