On-chip wide uv-vis-nir spectral sensor

Abstract

A spectral sensor that integrates a series of luminescent materials on a specially designed semiconductor substrate, providing full range spectral coverage from about 200 nm to about 1700 nm in wavelength (UVA-UVB-VIS-NIRI-NIRII). Components of this sensor solution include: an architecture on gold-coated ceramic substrate, a series of metal oxide emitters in the UV wavelength region (200-400 nm), a series of organic emitters in the visible wavelength region (400-800 nm), a series of organic emitters in the near-infrared wavelength region (800-1700 nm), a complementary metal-oxide-semiconductor (CMOS) UV-Vis detection (200-950 nm), an Indium gallium arsenide (InGaAs) window for NIR detection (950-1700 nm), and a micro-circuit to control illumination/detection in time series with Fourier transform filtering to remove environmental noise and to isolate signals. The highly compact integrated sensor provides fast, stable, and reproducible spectral array data that covers the full wavelength range from about 200 to about 1700 nm.