The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2026
Filed:
Sep. 11, 2023
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Jeonghyeon Lee, Suwon-si, KR;
Sangyub Ie, Suwon-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45578 (2013.01); C23C 16/4583 (2013.01);
Abstract
A film forming apparatus, may include: a chamber having an internal space and an exhaust port; a wafer carrier disposed in the internal space of the chamber; a gas supply pipe disposed through the chamber; and an injector disposed in the internal space of the chamber and connected to the gas supply pipe, wherein the gas supply pipe may be connected to a central portion of the injector in a longitudinal direction.
Quick Actions:
Lee, Jeonghyeon. (2026). Film forming apparatus (U.S. Patent No. 12774523). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12774523
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile