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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12774354 B1

PDFFull Text
Date of Patent:
Oct. 27, 2026

Filed:

Feb. 06, 2023

Polymer, resist composition including the same, and method of forming pattern using the resist composition

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Minsang Kim, Suwon-si, KR;

Haengdeog Koh, Suwon-si, KR;

Yoonhyun Kwak, Suwon-si, KR;

Beomseok Kim, Suwon-si, KR;

Chanjae Ahn, Suwon-si, KR;

Jungha Chae, Suwon-si, KR;

Sungwon Choi, Suwon-si, KR;

Assignee:

Samsung Electronics Co., Ltd., Gyeonggi-do, KR;

Attorney:

Harness, Dickey & Pierce, P.L.C.

Primary Examiner:

Amanda C Walke

Int. Cl.
CPC ...
C08F 212/14 (2006.01); C08F 228/06 (2006.01); G03F 7/004 (2006.01); G03F 7/038 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
C08F 212/14 (2013.01); C08F 228/06 (2013.01); G03F 7/004 (2013.01); G03F 7/038 (2013.01); G03F 7/2004 (2013.01);
Abstract

Provided are a polymer, a resist composition including the same, and a method of forming a pattern using the resist composition, the polymer including one or more of a first repeating unit represented by Formula 1 and a second repeating unit represented by Formula 2, and free of a repeating unit of which a structure changes by an acid: In Formulae 1 and 2, Rto R, b12, X, Rto R, b22, and Y are as described in the specification.

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Quick Actions:

Kim, Minsang. (2026). Polymer, resist composition including the same, and method of forming pattern using the resist composition (U.S. Patent No. 12774354). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12774354

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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