Substrate transfer unit and substrate treatment apparatus including the same

Abstract

A substrate transfer unit is provided. The substrate transfer unit includes: a rail part having a length in a horizontal direction; a vertical part moving along the rail part, guiding the vertical movement of a robot, which transfers a substrate, and having, formed therein, first flow paths that a fluid is introduced into and passes through; main duct parts having, formed therein, second flow paths which communicate with the first flow paths, having first end portions connected to the vertical part, and including outlets, which are formed at second end portions of the main duct parts and face a bottom surface of the index module, and through holes, which are formed on one or both sides of each of the second end portions; and auxiliary duct parts surrounding the through holes at the second end portions of the main duct parts and having, formed therein, expansion spaces which communicate with the second flow paths.