The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Feb. 14, 2024
Ngk Insulators, Ltd., Nagoya-City, JP;
Taro Usami, Kasamatsu-Town, JP;
Yohei Kajiura, Nagoya-City, JP;
NGK INSULATORS, LTD., Nagoya, JP;
Abstract
A wafer placement table includes a ceramic plate having a wafer placement surface on an upper surface, and a cooling plate provided on a lower surface of the ceramic plate. The cooling plate is made of a material having a lower thermal conductivity than Al. A length between an upper surface of a refrigerant flow path and the wafer placement surface is not constant and varies as being long in one part and short in another part. A flow-path cross-sectional area of the refrigerant flow path is not constant and varies as being small in one part and large in another part. An aspect ratio defined as a ratio of a vertical length to a horizontal length of a flow-path cross section of the refrigerant flow path is not constant and varies as being small in one part and large in another part.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile