The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Jul. 03, 2023
Korea Institute of Fusion Energy, Daejeon, KR;
Jong Sik Kim, Gunsan-si, KR;
Yong Hyun Kim, Gunsan-si, KR;
Dae Chul Kim, Gunsan-si, KR;
Young Woo Kim, Hwaseong-si, KR;
Jong Bae Park, Gunsan-si, KR;
Jong Hyun Shin, Gunsan-si, KR;
KOREA INSTITUTE OF FUSION ENERGY, Daejeon, KR;
Abstract
Disclosed are an electrode for a capacitively coupled plasma generating device, a capacitively coupled plasma generating device comprising same, and a capacitively coupled plasma uniformity adjusting method. This electrode for a capacitively coupled plasma generating device may comprise: a first plate-shaped electrode; a second plate-shaped electrode positioned around the first plate-shaped electrode on the same plane as the first plate-shaped electrode; and a power supply unit for applying radio-frequency (RF) power to the first plate-shaped electrode and the second plate-shaped electrode. The power supply unit may apply RF power having different phases to the first plate-shaped electrode and the second plate-shaped electrode.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile