The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
May. 28, 2024
Yang Pan, Singapore, SG;
Yang Pan, Singapore, SG;
Inspiring Atoms Pte Ltd, Singapore, SG;
Abstract
This invention disclosure presents a mass flow controller (MFC) with a dual-mode proportional-integral-derivative (PID) control loop. In training mode, the PID loop determines solenoid coil current setpoints for various operating states stipulated by a process recipe, storing them for later retrieval. During the execution of a semiconductor manufacturing process, the stored setpoints enable rapid flow delivery without continuous PID control. Real-time flow rate monitoring and Statistical Process Control (SPC) ensure stability, triggering retraining if necessary, enhancing MFC speed, accuracy, and reliability.
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